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The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber

Applied Microscopy 2020년 50권 1호 p.24 ~ 24
Tordoff Ben, Hartfield Cheryl, Holwell Andrew J., Hiller Stephan, Kaestner Marcus, Kelly Stephen, 이재한, Muller Sascha, Perez-Willard Fabian, Volkenandt Tobias, White Robin, Rodgers Thomas,
소속 상세정보
 ( Tordoff Ben ) - ZEISS Research Microscopy Solutions
 ( Hartfield Cheryl ) - ZEISS Process Control Solutions
 ( Holwell Andrew J. ) - ZEISS Research Microscopy Solutions
 ( Hiller Stephan ) - ZEISS Research Microscopy Solutions
 ( Kaestner Marcus ) - ZEISS Process Control Solutions
 ( Kelly Stephen ) - Carl Zeiss X-ray Microscopy
이재한 ( Lee Jae-Han ) - ZEISS Research Microscopy Solutions
 ( Muller Sascha ) - ZEISS Process Control Solutions
 ( Perez-Willard Fabian ) - ZEISS Research Microscopy Solutions
 ( Volkenandt Tobias ) - ZEISS Research Microscopy Solutions
 ( White Robin ) - Carl Zeiss X-ray Microscopy
 ( Rodgers Thomas ) - ZEISS Research Microscopy Solutions

Abstract


The development of the femtosecond laser (fs laser) with its ability to provide extremely rapid athermal ablation of materials has initiated a renaissance in materials science. Sample milling rates for the fs laser are orders of magnitude greater than that of traditional focused ion beam (FIB) sources currently used. In combination with minimal surface post-processing requirements, this technology is proving to be a game changer for materials research. The development of a femtosecond laser attached to a focused ion beam scanning electron microscope (LaserFIB) enables numerous new capabilities, including access to deeply buried structures as well as the production of extremely large trenches, cross sections, pillars and TEM H-bars, all while preserving microstructure and avoiding or reducing FIB polishing. Several high impact applications are now possible due to this technology in the fields of crystallography, electronics, mechanical engineering, battery research and materials sample preparation. This review article summarizes the current opportunities for this new technology focusing on the materials science megatrends of engineering materials, energy materials and electronics.

키워드

LaserFIB; FIB-SEM; PFIB; Crossbeam laser; Femtosecond laser; Dual chamber SEM

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